4/15/2010	10:40:10 AM	Bypass valve closed
4/15/2010	10:40:11 AM	Bypass valve opened
4/15/2010	10:40:11 AM	Bypass valve closed
4/15/2010	10:40:12 AM	Main Vac valve closed
4/15/2010	10:40:50 AM	Bypass valve opened
4/15/2010	10:40:50 AM	Main Vac valve opened
4/15/2010	10:40:54 AM	Helium valve closed
4/15/2010	10:41:00 AM	SiCl4 pre valve closed
4/15/2010	10:41:01 AM	SiCl4 post valve closed
4/15/2010	11:21:35 AM	SiCl4 pre valve opened
4/15/2010	11:21:44 AM	SiCl4 pre valve closed
4/15/2010	11:22:06 AM	SiCl4 pre valve opened
4/15/2010	11:22:17 AM	SiCl4 pre valve closed
4/15/2010	11:22:38 AM	SiCl4 pre valve opened
4/15/2010	11:22:56 AM	SiCl4 pre valve closed
4/15/2010	11:23:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/15/2010	11:23:22 AM	Recipe started at 11:23 AM
4/15/2010	11:23:22 AM	H2 valve closed
4/15/2010	11:23:22 AM	BCl3 valve closed
4/15/2010	11:23:22 AM	PH3 valve closed
4/15/2010	11:23:22 AM	SiCl4 pre valve closed
4/15/2010	11:23:22 AM	SiCl4 post valve closed
4/15/2010	11:23:22 AM	Main Vac valve closed
4/15/2010	11:23:22 AM	Bypass valve closed
4/15/2010	11:23:22 AM	Bubbler valve closed
4/15/2010	11:23:22 AM	Helium valve opened
4/15/2010	11:23:22 AM	Helium MFC set to  500.000000
4/15/2010	11:23:22 AM	H2 MFC set to  0.000000
4/15/2010	11:23:22 AM	BCl3 MFC set to  0.000000
4/15/2010	11:23:22 AM	SiCl4 MFC set to  0.000000
4/15/2010	11:23:22 AM	Bypass solenoid MFC set to  0.000000
4/15/2010	11:23:22 AM	Tube furnace set to 0
4/15/2010	11:24:50 AM	Helium valve closed
4/15/2010	11:24:50 AM	H2 valve closed
4/15/2010	11:24:50 AM	BCl3 valve closed
4/15/2010	11:24:50 AM	PH3 valve closed
4/15/2010	11:24:50 AM	SiCl4 pre valve closed
4/15/2010	11:24:50 AM	SiCl4 post valve closed
4/15/2010	11:24:50 AM	Main Vac valve closed
4/15/2010	11:24:50 AM	Bypass valve closed
4/15/2010	11:24:50 AM	Bubbler valve closed
4/15/2010	11:24:50 AM	Helium MFC set to  0.000000
4/15/2010	11:24:50 AM	H2 MFC set to  0.000000
4/15/2010	11:24:50 AM	BCl3 MFC set to  0.000000
4/15/2010	11:24:50 AM	SiCl4 MFC set to  0.000000
4/15/2010	11:24:50 AM	Bypass solenoid MFC set to  0.000000
4/15/2010	11:24:50 AM	Tube furnace set to 0
4/15/2010	11:24:50 AM	Run finished at 11:24 AM
4/15/2010	11:24:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/15/2010	11:24:58 AM	SiCl4 post valve opened
4/15/2010	11:25:05 AM	SiCl4 post valve closed
4/15/2010	11:30:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/15/2010	11:30:47 AM	Recipe started at 11:30 AM
4/15/2010	11:30:47 AM	Helium valve closed
4/15/2010	11:30:47 AM	H2 valve closed
4/15/2010	11:30:47 AM	BCl3 valve closed
4/15/2010	11:30:47 AM	PH3 valve closed
4/15/2010	11:30:47 AM	SiCl4 pre valve closed
4/15/2010	11:30:47 AM	SiCl4 post valve closed
4/15/2010	11:30:47 AM	Main Vac valve closed
4/15/2010	11:30:47 AM	Bubbler valve closed
4/15/2010	11:30:47 AM	Bypass valve opened
4/15/2010	11:30:47 AM	Helium MFC set to  0.000000
4/15/2010	11:30:47 AM	H2 MFC set to  0.000000
4/15/2010	11:30:47 AM	BCl3 MFC set to  0.000000
4/15/2010	11:30:47 AM	SiCl4 MFC set to  0.000000
4/15/2010	11:30:47 AM	Bypass solenoid MFC set to  0.000000
4/15/2010	11:30:48 AM	Tube furnace set to 0
4/15/2010	11:31:28 AM	Helium valve closed
4/15/2010	11:31:28 AM	H2 valve closed
4/15/2010	11:31:28 AM	BCl3 valve closed
4/15/2010	11:31:28 AM	PH3 valve closed
4/15/2010	11:31:28 AM	SiCl4 pre valve closed
4/15/2010	11:31:28 AM	SiCl4 post valve closed
4/15/2010	11:31:28 AM	Bubbler valve closed
4/15/2010	11:31:28 AM	Main Vac valve opened
4/15/2010	11:31:28 AM	Bypass valve opened
4/15/2010	11:31:28 AM	Helium MFC set to  0.000000
4/15/2010	11:31:28 AM	H2 MFC set to  0.000000
4/15/2010	11:31:28 AM	BCl3 MFC set to  0.000000
4/15/2010	11:31:28 AM	SiCl4 MFC set to  0.000000
4/15/2010	11:31:28 AM	Bypass solenoid MFC set to  0.000000
4/15/2010	11:31:29 AM	Tube furnace set to 0
4/15/2010	11:31:29 AM	Run finished at 11:31 AM
4/15/2010	11:31:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/15/2010	11:32:24 AM	Bypass valve closed
4/15/2010	11:32:26 AM	Main Vac valve closed
4/15/2010	11:32:33 AM	Main Vac valve opened
4/15/2010	11:33:16 AM	Helium MFC set to  500.000000
4/15/2010	11:33:17 AM	Helium valve opened
4/15/2010	11:33:26 AM	Helium valve closed
4/15/2010	11:33:42 AM	Helium valve opened
4/15/2010	11:39:47 AM	Helium valve closed
4/15/2010	11:41:52 AM	Main Vac valve closed
4/15/2010	11:41:58 AM	Main Vac valve opened
4/15/2010	11:42:00 AM	Bypass valve opened
4/15/2010	1:21:49 PM	Bypass valve closed
4/15/2010	1:21:50 PM	Main Vac valve closed
4/15/2010	1:21:59 PM	Main Vac valve opened
4/15/2010	1:22:39 PM	Main Vac valve closed
4/15/2010	1:23:03 PM	Main Vac valve opened
4/15/2010	1:31:29 PM	Tube furnace set to 0
4/15/2010	1:31:37 PM	Tube furnace set to 8
4/15/2010	1:31:41 PM	Tube furnace set to 0
4/15/2010	1:31:55 PM	Tube furnace set to 10
4/15/2010	1:32:00 PM	Tube furnace set to 1000
4/15/2010	1:32:58 PM	Main Vac valve closed
4/15/2010	1:32:59 PM	Helium valve opened
4/15/2010	1:34:29 PM	Bubbler valve opened
4/15/2010	1:47:55 PM	H2 MFC set to  500.000000
4/15/2010	1:48:01 PM	SiCl4 MFC set to  325.000000
4/15/2010	1:49:30 PM	H2 valve opened
4/15/2010	1:49:31 PM	Helium valve closed
4/15/2010	1:51:57 PM	SiCl4 pre valve opened
4/15/2010	1:51:58 PM	SiCl4 post valve opened
4/15/2010	1:53:13 PM	SiCl4 post valve closed
4/15/2010	1:53:14 PM	SiCl4 pre valve closed
4/15/2010	1:55:40 PM	Program started after a nonstandard shutdown
4/15/2010	1:55:40 PM	Helium valve closed
4/15/2010	1:55:40 PM	H2 valve closed
4/15/2010	1:55:40 PM	BCl3 valve closed
4/15/2010	1:55:40 PM	PH3 valve closed
4/15/2010	1:55:40 PM	SiCl4 pre valve closed
4/15/2010	1:55:40 PM	SiCl4 post valve closed
4/15/2010	1:55:40 PM	Main Vac valve closed
4/15/2010	1:55:40 PM	Bypass valve closed
4/15/2010	1:55:40 PM	Bubbler valve closed
4/15/2010	1:55:40 PM	Helium MFC set to  0.000000
4/15/2010	1:55:40 PM	H2 MFC set to  0.000000
4/15/2010	1:55:40 PM	BCl3 MFC set to  0.000000
4/15/2010	1:55:40 PM	SiCl4 MFC set to  0.000000
4/15/2010	1:55:40 PM	Bypass solenoid MFC set to  760.000000
4/15/2010	1:55:40 PM	Error in setting the tube furnace  to 0
4/15/2010	1:59:23 PM	Program started after a nonstandard shutdown
4/15/2010	1:59:23 PM	Helium valve closed
4/15/2010	1:59:23 PM	H2 valve closed
4/15/2010	1:59:23 PM	BCl3 valve closed
4/15/2010	1:59:23 PM	PH3 valve closed
4/15/2010	1:59:23 PM	SiCl4 pre valve closed
4/15/2010	1:59:23 PM	SiCl4 post valve closed
4/15/2010	1:59:23 PM	Main Vac valve closed
4/15/2010	1:59:23 PM	Bypass valve closed
4/15/2010	1:59:23 PM	Bubbler valve closed
4/15/2010	1:59:23 PM	Helium MFC set to  0.000000
4/15/2010	1:59:23 PM	H2 MFC set to  0.000000
4/15/2010	1:59:23 PM	BCl3 MFC set to  0.000000
4/15/2010	1:59:23 PM	SiCl4 MFC set to  0.000000
4/15/2010	1:59:23 PM	Bypass solenoid MFC set to  760.000000
4/15/2010	1:59:24 PM	Tube furnace set to 0
4/15/2010	1:59:28 PM	Tube furnace set to 1000
4/15/2010	1:59:35 PM	Tube furnace set to 950
4/15/2010	1:59:41 PM	Tube furnace set to 1000
4/15/2010	1:59:50 PM	H2 MFC set to  500.000000
4/15/2010	1:59:52 PM	H2 valve opened
4/15/2010	1:59:56 PM	Bubbler valve opened
4/15/2010	2:00:26 PM	SiCl4 MFC set to  325.000000
4/15/2010	2:00:51 PM	SiCl4 pre valve opened
4/15/2010	2:00:53 PM	SiCl4 post valve opened
4/15/2010	2:00:57 PM	SiCl4 post valve closed
4/15/2010	2:01:09 PM	SiCl4 pre valve closed
4/15/2010	2:01:14 PM	SiCl4 pre valve opened
4/15/2010	2:01:16 PM	SiCl4 pre valve closed
4/15/2010	2:01:26 PM	SiCl4 pre valve opened
4/15/2010	2:01:27 PM	SiCl4 pre valve closed
4/15/2010	2:01:38 PM	Tube furnace set to 0
4/15/2010	2:01:48 PM	Helium MFC set to  500.000000
4/15/2010	2:01:50 PM	Helium valve opened
4/15/2010	2:01:51 PM	H2 valve closed
4/15/2010	2:02:12 PM	SiCl4 pre valve opened
4/15/2010	2:02:14 PM	SiCl4 pre valve closed
4/15/2010	2:02:33 PM	Helium valve closed
4/15/2010	2:02:34 PM	Bubbler valve closed
4/15/2010	2:02:47 PM	SiCl4 pre valve opened
4/15/2010	2:02:50 PM	SiCl4 pre valve closed
4/15/2010	2:03:30 PM	Tube furnace set to 1000
4/15/2010	2:04:21 PM	H2 valve opened
4/15/2010	2:04:24 PM	Bubbler valve opened
4/15/2010	2:05:21 PM	Bubbler valve closed
4/15/2010	2:05:22 PM	H2 valve closed
4/15/2010	2:05:28 PM	Bypass valve opened
4/15/2010	2:05:30 PM	Bypass valve closed
4/15/2010	2:05:46 PM	Bypass valve opened
4/15/2010	2:05:48 PM	Bypass valve closed
4/15/2010	2:05:54 PM	Bypass valve opened
4/15/2010	2:05:57 PM	Bypass valve closed
4/15/2010	2:06:17 PM	Bypass valve opened
4/15/2010	2:06:29 PM	Main Vac valve opened
4/15/2010	2:06:45 PM	Helium valve opened
4/15/2010	2:07:38 PM	SiCl4 pre valve opened
4/15/2010	2:07:58 PM	SiCl4 pre valve closed
4/15/2010	2:07:59 PM	Helium valve closed
4/15/2010	2:08:18 PM	Helium valve opened
4/15/2010	2:08:23 PM	Bypass valve closed
4/15/2010	2:08:24 PM	Main Vac valve closed
4/15/2010	2:09:43 PM	Bubbler valve opened
4/15/2010	2:10:25 PM	H2 valve opened
4/15/2010	2:10:26 PM	Helium valve closed
4/15/2010	2:11:44 PM	SiCl4 pre valve opened
4/15/2010	2:11:57 PM	SiCl4 pre valve closed
4/15/2010	2:12:33 PM	SiCl4 pre valve opened
4/15/2010	2:12:37 PM	SiCl4 pre valve closed
4/15/2010	2:13:04 PM	SiCl4 pre valve opened
4/15/2010	2:13:08 PM	SiCl4 post valve opened
4/15/2010	2:13:10 PM	SiCl4 post valve closed
4/15/2010	2:13:17 PM	Bubbler valve closed
4/15/2010	2:13:31 PM	Bubbler valve opened
4/15/2010	2:13:37 PM	Bubbler valve closed
4/15/2010	2:13:38 PM	H2 valve closed
4/15/2010	2:13:39 PM	SiCl4 pre valve closed
4/15/2010	2:14:01 PM	Tube furnace set to 0
4/15/2010	2:40:17 PM	Bypass valve opened
4/15/2010	2:40:18 PM	Bypass valve closed
4/15/2010	2:40:27 PM	Bypass valve opened
4/15/2010	2:40:30 PM	Bypass valve closed
4/15/2010	2:41:34 PM	Bypass valve opened
4/15/2010	2:42:11 PM	Bypass valve closed
4/15/2010	2:42:12 PM	Bypass valve opened
4/15/2010	2:42:16 PM	Bypass valve closed
4/15/2010	2:42:17 PM	Bypass valve opened
4/15/2010	2:42:21 PM	Bypass valve closed
4/15/2010	2:42:22 PM	Bypass valve opened
4/15/2010	2:42:27 PM	Bypass valve closed
4/15/2010	2:42:28 PM	Bypass valve opened
4/15/2010	2:42:33 PM	Bypass valve closed
4/15/2010	2:42:33 PM	Bypass valve opened
4/15/2010	2:45:24 PM	Bypass valve closed
4/15/2010	2:45:24 PM	Bypass valve opened
4/15/2010	2:45:28 PM	Bypass valve closed
4/15/2010	2:45:28 PM	Bypass valve opened
4/15/2010	2:45:35 PM	Bypass valve closed
4/15/2010	2:45:36 PM	Bypass valve opened
4/15/2010	2:53:09 PM	Program started after a nonstandard shutdown
4/15/2010	2:53:09 PM	Helium valve closed
4/15/2010	2:53:09 PM	H2 valve closed
4/15/2010	2:53:09 PM	BCl3 valve closed
4/15/2010	2:53:09 PM	PH3 valve closed
4/15/2010	2:53:09 PM	SiCl4 pre valve closed
4/15/2010	2:53:09 PM	SiCl4 post valve closed
4/15/2010	2:53:09 PM	Main Vac valve closed
4/15/2010	2:53:09 PM	Bypass valve closed
4/15/2010	2:53:09 PM	Bubbler valve closed
4/15/2010	2:53:09 PM	Helium MFC set to  0.000000
4/15/2010	2:53:09 PM	H2 MFC set to  0.000000
4/15/2010	2:53:09 PM	BCl3 MFC set to  0.000000
4/15/2010	2:53:09 PM	SiCl4 MFC set to  0.000000
4/15/2010	2:53:09 PM	Bypass solenoid MFC set to  760.000000
4/15/2010	2:53:09 PM	Error in setting the tube furnace  to 0
4/15/2010	2:55:53 PM	Program started after a nonstandard shutdown
4/15/2010	2:55:54 PM	Helium valve closed
4/15/2010	2:55:54 PM	H2 valve closed
4/15/2010	2:55:54 PM	BCl3 valve closed
4/15/2010	2:55:54 PM	PH3 valve closed
4/15/2010	2:55:54 PM	SiCl4 pre valve closed
4/15/2010	2:55:54 PM	SiCl4 post valve closed
4/15/2010	2:55:54 PM	Main Vac valve closed
4/15/2010	2:55:54 PM	Bypass valve closed
4/15/2010	2:55:54 PM	Bubbler valve closed
4/15/2010	2:55:54 PM	Helium MFC set to  0.000000
4/15/2010	2:55:54 PM	H2 MFC set to  0.000000
4/15/2010	2:55:54 PM	BCl3 MFC set to  0.000000
4/15/2010	2:55:54 PM	SiCl4 MFC set to  0.000000
4/15/2010	2:55:54 PM	Bypass solenoid MFC set to  760.000000
4/15/2010	2:55:54 PM	Tube furnace set to 0
4/15/2010	2:55:58 PM	Main Vac valve opened
4/15/2010	2:55:58 PM	Main Vac valve closed
4/15/2010	2:56:11 PM	Bypass valve opened
4/15/2010	2:56:14 PM	Main Vac valve opened
4/15/2010	2:56:29 PM	Main Vac valve closed
4/15/2010	2:57:08 PM	Bypass valve closed
4/15/2010	2:58:25 PM	Main Vac valve opened
4/15/2010	2:58:26 PM	Main Vac valve closed
4/15/2010	2:58:33 PM	Main Vac valve opened
4/15/2010	3:00:27 PM	Bypass valve opened
4/15/2010	3:02:14 PM	Main Vac valve closed
4/15/2010	3:03:13 PM	Main Vac valve opened
4/15/2010	3:03:46 PM	Main Vac valve closed
4/15/2010	3:03:53 PM	Bypass valve closed
4/15/2010	3:04:03 PM	Main Vac valve opened
4/15/2010	3:37:37 PM	Main Vac valve closed
4/15/2010	3:37:40 PM	Main Vac valve opened
4/15/2010	3:37:43 PM	Bypass valve opened
4/15/2010	3:37:44 PM	Bypass valve closed
4/15/2010	3:37:45 PM	Main Vac valve closed
4/15/2010	3:37:47 PM	Main Vac valve opened
4/15/2010	3:37:49 PM	Main Vac valve closed
4/15/2010	3:37:50 PM	Main Vac valve opened
4/15/2010	3:37:51 PM	Main Vac valve closed
4/15/2010	3:37:54 PM	Main Vac valve opened
4/15/2010	3:37:56 PM	Main Vac valve closed
4/15/2010	3:37:58 PM	Main Vac valve opened
4/15/2010	4:04:21 PM	Main Vac valve closed
4/15/2010	4:04:22 PM	Main Vac valve opened
4/15/2010	4:04:22 PM	Main Vac valve closed
4/15/2010	4:04:25 PM	Main Vac valve opened
4/15/2010	4:04:26 PM	Main Vac valve closed
4/15/2010	4:04:27 PM	Main Vac valve opened
4/15/2010	4:04:28 PM	Main Vac valve closed
4/15/2010	4:04:31 PM	Main Vac valve opened
4/15/2010	5:09:33 PM	Main Vac valve closed
4/15/2010	5:11:25 PM	Main Vac valve opened
4/15/2010	5:34:27 PM	Main Vac valve closed
4/15/2010	5:34:28 PM	Main Vac valve opened
4/15/2010	5:34:29 PM	Main Vac valve closed
4/15/2010	5:34:30 PM	Main Vac valve opened
4/15/2010	5:34:32 PM	Main Vac valve closed
4/15/2010	5:34:39 PM	Main Vac valve opened
4/15/2010	7:12:14 PM	Main Vac valve closed
4/15/2010	7:12:18 PM	Main Vac valve opened
